AlN/SiO2/Si3N4/Si(100)-Based CMOS Compatible Surface Acoustic Wave Filter With −12.8-dB Minimum Insertion Loss


A CMOS compatible AlN/SiO2/Si3N4/Si(100) surface acoustic wave (SAW) device has been fabricated and will be compared with standard AlN/SiO2-based devices. The presented filter demonstrates high potential for CMOS integrated high-frequency SAW devices. The filter insertion loss could be improved to −12.8 dB. The device exhibits high crosstalk suppression of −50 dB on a standard Si-substrate (10 $Omega $ cm). X-ray diffraction, (scanning) transmission electron microscopy, and energy dispersive X-ray spectroscopy studies correlate the signal quality with $c$ -axis orientation of aluminum nitride films on interdigitated transducer finger electrodes. Finite-element method simulations are in good agreement with the electric measurements and show typical Rayleigh particle displacement.

Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here

PROJECT TITLE:An Unified Multiscale Framework for Planar, Surface, and Curve SkeletonizationABSTRACT:Computing skeletons of 2D shapes, and medial surface and curve skeletons of 3D shapes, could be a difficult task. In particular,
PROJECT TITLE :The Generalization Ability of Online Algorithms for Dependent Data - 2013ABSTRACT:We study the generalization performance of online learning algorithms trained on samples coming from a dependent source of data.
PROJECT TITLE :A Fast Clustering-Based Feature Subset Selection Algorithm for High-Dimensional Data - 2013ABSTRACT:Feature selection involves identifying a subset of the most useful features that produces compatible results as
PROJECT TITLE :Improved particle swarm optimisation for multi-objective optimal power flow considering the cost, loss, emission and voltage stability indexABSTRACT :The study presents an improved particle swarm optimisation (IPSO)

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry