Study of the Multistep-Deposited and UV-Ozone-Annealed HfZrO Gate Stack by Scanning Tunneling Microscopy and Pulse $C$– $V$ Measurement


The TiN/HfZrO/$hboxSiO_x$ gate stack fashioned via multistep deposition cum room-temperature ultraviolet-ozone (UVO) anneal was examined using scanning tunneling microscopy and pulse capacitance–voltage measurement, and therefore the results were compared with those of the as-deposited (as-dep) and speedy-thermal-annealed (RTA) samples. Evidence shows that a massive half of the advance seen within the multistep-deposited cum UVO-annealed sample, relative to the RTA sample, could be a direct consequence of suppressed crystallization of the HfZrO and, hence, a reduction within the density of grain-boundary-related defects. Compared with the as-dep sample, the observed improvement because of UVO annealing is marginal, though further improvement, ascribed to the elimination of oxygen-vacancy defects, may be achieved by either increasing the UVO anneal time when each deposition step or increasing the amount of deposition steps. This makes multistep deposition and UVO annealing viable for additional enhancing the robustness of the high-k gate dielectric in a very gate-last method.

Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here

PROJECT TITLE :Power Allocation Study for Non-Orthogonal Multiple Access Networks With Multicast-Unicast Transmission - 2018ABSTRACT:This Project considers a downlink single-cell non-orthogonal multiple access (NOMA) network,
PROJECT TITLE :A Comprehensive Study on Social Network Mental Disorders Detection via Online Social Media Mining - 2018ABSTRACT:The explosive growth in popularity of social networking ends up in the problematic usage. An increasing
PROJECT TITLE :Empirical Study of Face Authentication Systems Under OSNFD Attacks - 2018ABSTRACT:Face authentication has been widely available on smartphones, tablets, and laptops. As various personal pictures are published in
PROJECT TITLE :Comparative study of 16-order FIR filter design using different multiplication techniques - 2017ABSTRACT:This study represents planning and implementation of an occasional power and high speed sixteen order FIR
PROJECT TITLE :Study On Ofdm Frequency Offset Estimation Based On Emd Algorithm - 2017ABSTRACT:A new methodology of applying EMD (empirical mode decomposition) algorithm to appreciate the CFO (carrier frequency offset) estimation

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry