ABSTRACT:

This paper reports on the control of the direct-contact La-silicate/Si interface structure with the aim of achieving scaled equivalent oxide thickness (EOT) and small interface state density. The interface state density at the direct-contact La-silicate/Si interface is found to be reduced to $hbox{1.6} times hbox{10}^{11} hbox{cm}^{-2}hbox{eV}^{-1}$ by annealing at 800 $^{circ}hbox{C}$ for 30 min in forming gas ambient, whereas excess silicate reaction concurrently induced a significant increase in EOT. By utilizing metal-inserted poly-Si (MIPS) stacks and their annealing at high temperature, the increase in EOT is drastically suppressed. At the same time, a superior interfacial property is obtained because the Si layer in the MIPS stacks prevents the excess oxygen diffusion from the atmosphere during the annealing process. As a result, the effective electron mobility of 155 $hbox{cm}^{2}/hbox{V}cdot{s}$ at 1 MV/cm and an EOT of 0.62 nm are successfully achieved by utilizing direct-contact La-silicate/Si structure. This result is comparable with the recorded effective electron mobility achieved by utilizing Hf-based oxides/Si structure. This demonstrates the advantage of our proposed method to realize the scaled EOT with a superior interfacial property for state-of-the-art metal–oxide–semiconductor field-effect transistors.


Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here


PROJECT TITLE : R3E Reliable Reactive Routing Enhancement for Wireless Sensor Networks - 2014 ABSTRACT: Providing reliable and efficient communication under fading channels is one of the major technical challenges in wireless
PROJECT TITLE : Network Resource Allocation for Users With Multiple Connections Fairness and Stability - 2014 ABSTRACT: This paper studies network resource allocation between users that manage multiple connections, possibly
PROJECT TITLE : Multi-Core Embedded Wireless Sensor Networks Architecture and Applications - 2014 ABSTRACT: Technological advancements in the silicon industry, as predicted by Moore's law, have enabled integration of billions
PROJECT TITLE : Multicast Capacity in MANET with Infrastructure Support - 2014 ABSTRACT: We study the multicast capacity under a network model featuring both node's mobility and infrastructure support. Combinations between
PROJECT TITLE : Joint Topology-Transparent Scheduling and QoS Routing in Ad Hoc Networks - 2014 ABSTRACT: This paper considers the problem of joint topologytransparent scheduling (TTS) and quality-of-service (QoS) routing in

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry