Improved Off-State Reliability of Nonvolatile Resistive Switch With Low Programming Voltage


A complementary atom switch (CAS) is proposed to appreciate low programming voltage and high off-state reliability for crossbar switch application. Two atom switches with bipolar operation are connected in series with opposite direction, in which the 2 atom switches work as a single component. The 2 off-state atom switches within the CAS complementarily divide voltage stress, greatly enlarging the off-state lifetime. The CAS is embedded in Cu BEOL on a 65-nm-node CMOS platform without degrading the CMOS and interconnect performances. The CAS using two atom switches is one amongst the candidates for realizing energy-economical nonvolatile programmable switches.

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