Impact of Forming Gas Annealing on the Performance of Surface-Channel MOSFETs With an ALD Gate Dielectric


We investigated the effect of forming gas (5% $hbox{H}_{2}/hbox{95}% hbox{N}_{2}$) annealing on surface-channel $hbox{In}_{0.53} hbox{Ga}_{0.47}hbox{As}$ MOSFETs with atomic-layer-deposited $ hbox{Al}_{2}hbox{O}_{3}$ as the gate dielectric. We found that a forming gas anneal (FGA) at 300 $^{circ}hbox{C}$ for 30 min was efficient at removing or passivating positive fixed charges in $hbox{Al}_{2}hbox{O}_{3}$ , resulting in a shift of the threshold voltage from $-$0.63 to 0.43 V and in an increase in the $I_{rm on}/I_{rm off}$ ratio of three orders of magnitude. Following FGA, the MOSFETs exhibited a subthreshold swing of 150 mV/dec, and the peak transconductance, drive current, and peak effective mobility increased by 29%, 25%, and 15%, respectively. FGA significantly improved the source- or drain-to-substrate junction isolation, with a reduction of two orders of magnitude in the reverse bias leakage exhibited by the Si-implanted $ hbox{In}_{0.53}hbox{Ga}_{0.47}hbox{As} hbox{n}^{+}/hbox{p}$ junctions, which is consistent with passivation of midgap defects in $hbox{In}_{0.53}hbox{Ga}_{0.47}hbox{As}$ by the FGA process.

Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here

PROJECT TITLE :Impact of RF–Switch Insertion Loss on the Performance of Space Modulation Techniques - 2018ABSTRACT:The RF switch has been highlighted recently as a core element for hardware implementations of the transmitters
PROJECT TITLE :Wireless Backhaul: Performance Modeling and Impact on User Association for 5G - 2018ABSTRACT:Wireless technology is the strongest contender for catering for the 5G backhaul (BH) stipulated performance, where optical
PROJECT TITLE :Impact of Antenna Correlation on Full-Duplex Two-Way Massive MIMO Relaying Systems - 2018ABSTRACT:This Project investigates the impact of antenna correlation on full duplex massive multiple-input multiple-output
PROJECT TITLE :Sponsoring Mobile Data: Analyzing the Impact on Internet Stakeholders - 2018ABSTRACT:As demand for mobile information will increase, end users increasingly would like to pay additional for consuming data. Sponsored
PROJECT TITLE :Impact of Inertia and Effective Short Circuit Ratio on Control of Frequency in Weak Grids Interfacing LCC-HVDC and DFIG-based Wind Farms - 2017ABSTRACT:Although nearly every overhead HVDC line is predicated on LCC

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry