Porous Silicon/Silicon Hybrid Substrate Applied to the Monolithic Integration of Common-Mode and Bandpass RF Filters


In order to develop high performances and miniaturized devices for RF communications, monolithic integration becomes an vital challenge for microelectronics industries. Bandpass filters and common-mode filter are integrated on six-in porous silicon (PS)/silicon hybrid substrates with PS regions below passive devices. An improvement of the rejection level on common mode was demonstrated on PS regards to low-resistivity silicon. Furthermore, the bandwidth differential was increased regards to bulk silicon and, so, permits the development of devices for top-speed communications systems.

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