Micromachined Graphite Rotor Based on Diamagnetic Levitation


This letter reports the first micromachined rotor of highly oriented pyrolytic graphite (HOPG), a sturdy diamagnetic material. The HOPG rotor is levitated above a permanent magnet structure to allow for its friction-free rotation. The 60zero- $mu $ m-thick HOPG rotor is micropatterned to possess four blades with 1-mm inner diameter disc and a pair of-mm outer diameter together with the blades. The levitation height of 132 $mu $ m measured for the rotor matches well with a simulation result. The revolution of the rotor is demonstrated by applying gas flow, showing stable continuous actuation with the maximum rate of 500 r/min. These promising results suggest potential applications of the mechanism toward frictionless microsensors and microactuators.

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