Suspended Thermopile for Microwave Power Sensors Based on Bulk MEMS and GaAs MMIC Technology


In this letter, the effects of the suspended thermopile on the microwave and sensing performances of 0.01-30 GHz thermoelectric microwave power sensors are researched by experiments, in order to get the cheap back-cavity dimension. The back-cavity beneath the thermopile is employed to depress thermal losses of the power sensors and is fabricated using the majority microelectromechanical systems process. 3 thermoelectric power sensors with totally different suspension lengths of the thermopile are accomplished with the GaAs monolithic microwave integrated circuit technology. The 3 power sensors show sensible microwave matching impedance, with measured reflection losses of but -21 dB up to 30 GHz. The good linearity between the input power and therefore the output thermovoltages is obtained. When the suspension length of the thermopile is 20, fifty, and eighty μm, the typical sensitivity of these power sensors is 186.nine, 238.9, and 286.0 μV/mW at 30 GHz, respectively. Yet, the relationships of the sensitivity with the microwave power and frequency are quantified underneath different suspension lengths of the thermopile.

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