ABSTRACT:

Microwave annealing of dopants in Si has been reported to produce highly activated junctions at temperatures far below those needed for comparable results using conventional thermal processes. However, during conventional fixed-frequency microwave heating, standing wave patterns can be established in the microwave processing chamber, resulting in nodes and antinodes over the processing area, resulting in thermal variations over the process wafer. In this letter, the effects of Si or quartz susceptor wafers on dopant activation and sheet resistance uniformity during fixed-frequency microwave anneal are studied. The composition, number, and spacing of susceptor wafers were varied in a systematic fashion in these experiments.


Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here


PROJECT TITLE : Secure and Efficient Data Transmission for Cluster-Based Wireless Sensor Networks - 2014 ABSTRACT: Secure data transmission is a critical issue for wireless sensor networks (WSNs). Clustering is an effective
PROJECT TITLE : R3E Reliable Reactive Routing Enhancement for Wireless Sensor Networks - 2014 ABSTRACT: Providing reliable and efficient communication under fading channels is one of the major technical challenges in wireless
PROJECT TITLE : Multi-Core Embedded Wireless Sensor Networks Architecture and Applications - 2014 ABSTRACT: Technological advancements in the silicon industry, as predicted by Moore's law, have enabled integration of billions
PROJECT TITLE : Joint Interference Coordination and Load Balancing for OFDMA Multihop Cellular Networks - 2014 ABSTRACT: Multihop cellular networks (MCNs) have drawn tremendous attention due to its high throughput and extensive
PROJECT TITLE : Efficient Data Collection for Large-Scale Mobile Monitoring Applications - 2014 ABSTRACT: Radio frequency identification (RFID) and wireless sensor networks (WSNs) have been popular in the industrial field,

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry