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A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor

1 1 1 1 1 Rating 4.80 (90 Votes)


We report a high-performance catalytic gas sensor based on a 3-D microheater. Two catalytic gas sensors were fabricated by sol-gel process, respectively based on a 3-D microheater with a concave active membrane and a comparative 2-D microheater with a rectangular active membrane, introducing Pd–Pt as catalytic material. Test results of the sensor response to methane indicate that the output signal $( Delta V)$, sensitivity, and signal-to-noise ratio of the 3-D microheater-based gas sensor were more than twice of those of the 2-D microheater-based gas sensor. Moreover, it had a higher output signal-to-power ratio $(Delta hbox{V/P})$.

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A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor - 4.8 out of 5 based on 90 votes

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