High-Power Magnetically Actuated Microswitches Fabricated in Laminates


We have a tendency to report on a microelectromechanical magnetic dc switch that operates at low management voltage (3 V), magnetically latches at on/off stage, and switches massive voltages and currents, both dc and ac, in under three ms. The device, which measures three mm $times$ 3 mm fully packaged, has been measured to handle 0.97 A at ten.half-dozen Vdc (10.a pair of W) and fifteen W at one hundred ten Vac. This represents a outstanding power-handling capability for such a small device, that is nearly impossible to realize in typical microelectromechanical system devices. The device is constructed using laminate MEMS technology, which is fully compatible with large-scale producing by advanced microelectronics packaging makers. This device has necessary applications in electronic switching applications for dc circuits, ac circuits, and, probably, for RF circuits.

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