Microelectromechanical Systems (MEMS) Based-Ultrasonic Electrostatic Actuators on a Flexible Substrate


We have a tendency to gift a microelectromechanical systems (MEMS)-primarily based electrostatic actuator on a flexible substrate, made of polyethylene naphthalate, that emits acoustic waves at ultrasonic frequencies. The actuator incorporates a suspended diaphragm, created of parylene, of two–half-dozen-mm diameter and a 6-$muhboxm$ gap between the diaphragm and substrate. The actuator is driven by hydrogenated amorphous silicon integrated circuits. The driving circuits incorporates voltage-controlled oscillator and buffer chain, that can tune the output voltage from 3 to thirty two V with thirty five-V supply. One actuator emits ultrasonic waves at 25 kHz and pressure of twenty seven-dB sound pressure level (SPL), and a 1 $times$ two array emits up to thirty four.6-dB SPL at 1-cm distance.

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