High Sensitivity of Dry-Type Nanowire Sensors With High- Dielectrics for pH Detection via Capillary Atomic Force Microscope Tip Coating Technique


Dry-type poly-Si nanowire pH sensors with high-$k$ dielectrics have been demonstrated with the help of novel focus ion beam built capillary atomic force microscopy (C-AFM) tip. By means of this C-AFM tip coating technique, the comparatively few testing solutions will be transferred onto the surface of a nanowire, preventing the sensor device from the immersion within the liquid and thus suppressing the attainable leakage current from the testing solution. As compared with the TEOS $hboxSiO_2$, the pH sensors comprising $hboxAl_2hboxO_3$, $ hboxTiO_2$, and $hboxHfO_2$ high- $k$ materials exhibit the better sensitivities thanks to their enhanced capacitances. The most effective sensitivity ( nA/pH) and linearity (99.69percent) for a $hboxHfO_2$ dielectric will be ascribed to the higher $k$ price and larger bandgap with respect to the $hboxAl_2 hboxO_3$ and $hboxTiO_2$, accordingly. Consequently, the C-AFM tip coating technique incorporating with $hboxHfO_2$ dielectric suggests the potential for the detection of a second amount of biomedicines.

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