High-Responsivity Solar-Blind Photodetector Based on Thin Film


Adopting relatively high substrate temperature and low growth rate, single-section wurtzite $hboxMg_0.46hboxZn_0.54hboxO$ film is grown on a quartz substrate by homemade magnetron sputtering. Solar-blind photodetector is fabricated primarily based on the MgZnO film and shows a peak responsivity of 3.four A/W at 265 nm with a cutoff wavelength of 280 nm underneath 10 V. As applied voltage increased to 70 V, the peak responsivity is up to 31.1 A/W equivalent to an internal gain of 148 times. The large internal gain was attributed to the trapping of photoionized holes at $E_v + 282 hboxmeV$ deep level through deep-level transient spectral measurement.

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