PROJECT TITLE :
PDMS-Coated Piezoresistive NEMS Diaphragm for Chloroform Vapor Detection
A polydimethylsiloxane (PDMS)-coated nanoelectromechanical systems diaphragm embedded with silicon nanowires (SiNWs) is proposed for chloroform vapor detection at room temperature. The PDMS film swells and results in the deformation of micro-diaphragm when it's exposed to vapor. The SiNWs are connected during a Wheatstone bridge which is employed to remodel the deformation into a measurable output voltage. This sensor provides smart linearity, sensitivity, and repeatability. The sensitivity of our sensor for chloroform vapor detection is one.forty one $muhboxV/V/ppm$, whereas the facility consumption is as low as a pair of $muhboxW$.
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