PROJECT TITLE :

Effect of Nitrogen Passivation on the Performance of MIM Capacitors With a Crystalline- $hbox_/hbox_$ Stacked Insulator

ABSTRACT:

$hbox{TiO}_{2}!/hbox{SiO}_{2}$ stacked dielectric-based metal–insulator–metal capacitors with different thermal and nitrogen plasma treatments (NPTs) were explored in this letter. As the $hbox{TiO}_{2}$ dielectric crystallizes from amorphous phase after a thermal treatment, capacitance density increasing from 7.7 to 11.9 $hbox{fF}/muhbox{m}^{2}$ was obtained at the price of aggravating leakage current and wider distribution in device characteristics. With NPT to well passivate grain-boundary-related defects in the crystalline $hbox{TiO}_{2}$ film, devices still keep a satisfactory capacitance level of 11.2 $hbox{fF}/mu hbox{m}^{2}$ while exhibiting suppressed leakage current by a factor of 53, a lower quadratic voltage coefficient of capacitance $(hbox{VCC-}alpha)$ of 30 $hbox{ppm/V}^{2}$, near frequency dispersion-free capacitance, a better temperature coefficient of capacitance of 82 $hbox{ppm}/^{circ}hbox{C}$ , and more controllable device uniformity. The mechanism for the improved electrical characteristics was further confirmed by atomic force microscope. These results suggest that NPT paves a new avenue to further advance the performance of crystalline dielectric-based devices.


Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here


PROJECT TITLE :Effect of Switched-Capacitor CMFB on the Gain of Fully Differential OpAmp for Design of Integrators - 2018ABSTRACT:Switched capacitor common-mode feedback (SC-CMFB) may be a common technique for stabilization of
PROJECT TITLE :Effect of circulating current on input linecurrent of 12-pulse rectifier with activeinter-phase reactor - 2016ABSTRACT:This study analyses quantitatively the result of circulating current's amplitude and phase on
PROJECT TITLE :Low Stress Cycle Effect in IGBT Power Module Die-Attach Lifetime ModelingABSTRACT:Operational management for reliability of power electronic converters requires sensitive condition monitoring and accurate lifetime
PROJECT TITLE :Validation of Cross Sections for Monte Carlo Simulation of the Photoelectric EffectABSTRACT:Several total and partial photoionization cross section calculations, based mostly on both theoretical and empirical approaches,
PROJECT TITLE :Effect of Metal Gate Granularity Induced Random Fluctuations on Si Gate-All-Around Nanowire MOSFET 6-T SRAM Cell StabilityABSTRACT:During this paper, we have a tendency to present a variability-aware three-D mixed-mode

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry