PROJECT TITLE :

Operating TSV in Stable Accumulation Capacitance Region by Utilizing $hbox_hbox_$-Induced Negative Fixed Charge

ABSTRACT:

The variation of through-silicon-via (TSV) capacitance caused by nonuniform hot-spot heating can lead to spatial circuit performance variation; this effect is undesirable for 3-D IC design. Hence, stable TSV capacitance is desired to overcome this issue. In this letter, stable TSV capacitance is achieved by utilizing $hbox{Al}_{2}hbox{O}_{3}$-induced negative fixed charge $(vert Q_{f}vert = hbox{7.44} times hbox{10}^{11} hbox{cm}^{-2})$ at the Si–liner interface. This causes a positive shift in the flat-band voltage $(Delta V_{rm FB} = hbox{6.85} hbox{V})$ and results in the TSV operating in the stable accumulation capacitance region within operating voltage of interests ( $sim$0–5 V). The leakage current density of the TSV with $hbox{Al}_{2}hbox{O}_{3}$ layer and PETEOS liner is improved by $simhbox{10}times$ after annealing in forming gas $(hbox{N}_{2}/hbox{H}_{2})$ at 300 $^{circ}hbox{C}$ for 30 min.


Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here


PROJECT TITLE :Operating Frequency Improvement On FPGA Implementation Of A Pipeline Large-FFT Processor - 2017ABSTRACT:In this paper, circuit complexity reduction in FPGA implementation of enormous N-point Radix-22 FFT with single-path
PROJECT TITLE :Frequency Control of Island VSC-HVDC Links Operating in Parallel with AC Interconnectors and Onsite Generation - 2017ABSTRACT:The main scope of this paper is to propose a appropriate frequency management scheme
PROJECT TITLE :Frequency Control of Island VSC-HVDC Links Operating in Parallel with AC Interconnectors and Onsite Generation - 2017ABSTRACT:The main scope of this paper is to propose a suitable frequency management scheme for
PROJECT TITLE :Operating Limits of Three-Phase Multifunctional Photovoltaic Converters Applied for Harmonic Current Compensation - 2017ABSTRACT:The most objective of a photovoltaic (PV) inverter is to inject the PV power into
PROJECT TITLE : Design and Implementation of High-Speed All-Pass Transformation-Based Variable Digital Filters by Breaking the Dependence of Operating Frequency on Filter Order - 2016 ABSTRACT: All-pass transformation (APT)-based

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry