Electroplated Ni-CNT Nanocomposite for Micromechanical Resonator Applications


In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped–clamped beam resonators fabricated using the nanocomposite show $sim$27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the $Q$ factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the $Q$ performance of the beam resonators.

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