On an Ammonia Gas Sensor Based on a Pt/AlGaN Heterostructure Field-Effect Transistor


A new and interesting Pt/AlGaN heterostructure field-effect transistor (HFET)-based ammonia gas sensor is fabricated and investigated. The related ammonia-sensing mechanisms, including direct dissociation of ammonia gas and triple-point model, are presented. Experimentally, the maximum transconductance variation $Delta g_{m}$ and threshold voltage variation $Delta V_{rm th}$ are 16.63 mS/mm and 318.1 mV, respectively, upon exposing to a 10 000-ppm $hbox{NH}_{3}/hbox{air}$ gas. In addition, the maximum sensing response and rectification ratio of 113.4 and $hbox{2.1} times hbox{10}^{3}$, respectively, are obtained when 10 000- and 35-ppm $hbox{NH}_{3}/hbox{air}$ gases are introduced. Therefore, the studied Pt/AlGaN HFET shows the promise for ammonia-gas-sensing applications.

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