PROJECT TITLE :

An Improved ICP Etching for Mesa-Terminated 4H-SiC p-i-n Diodes

ABSTRACT:

An improved Bosch etching method using inductively coupled plasma system has been investigated for the etching of 4H-silicon carbide (SiC). By optimizing the etch parameters, a mesa structure with nearly vertical sidewall and without microtrench at the bottom corner has been fabricated, and therefore the formation and elimination of the microtrench are preliminarily mentioned for the Bosch cycles in this paper. Scanning electron microscopic analysis was used to demonstrate the etched morphology under different etching conditions. Straightforward mesa-terminated 4H-SiC p-i-n diodes were fabricated. The result of the improved mesa structure on the dc characteristics of the diodes has been experimentally verified by comparing with the nonoptimized mesa structure with microtrench. The results exhibited a utterly consistent forward tendency and a similar reverse leakage level less than −90zero V for both diodes, but different blocking performances. A maximum blocking voltage of 1565 V at area temperature was obtained from the nonmicrotrenched device with a mesa height of four.3 $mu textm$ , resembling sixty six% of a parallel plane breakdown voltage for the drift layer of fifteen $mu textm$ . Slight microtrench is the main cause of premature breakdown.


Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here


PROJECT TITLE :Improved Lyapunov Function primarily based ControlApproach for Single-stage inverter Grid InterfacingSolar Photovoltaic SystemABSTRACT:In this paper improved Lyapunov-operate primarily based control approach for
PROJECT TITLE :A Multiple Improved Notch Filter Based Management for Single Stage PV System Tied to Weak GridABSTRACT:In this paper, a management theme based on improvement in an exceedingly generalized integrator is implemented
PROJECT TITLE :An Improved Adaptive P&O Technique for TwoStage Grid Interfaced SPVECSABSTRACT:This work presents an improved perturb and observe with adaptive perturbation size (IAP&O) algorithm for harnessing most power from
PROJECT TITLE :Implementation of improved Perturb & Observe MPPT technique with confined search space for standalone photovoltaic systemABSTRACT:Solar photovoltaic technology has been adopted by varied world PV markets with
PROJECT TITLE :Improved Low-Complexity Sphere Decoding for Generalized Spatial Modulation - 2018ABSTRACT:During this letter, two types of improved sphere decoding (SD) algorithms for generalized spatial modulation (GSM), termed

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry