Nanometric Metal-Film Thickness Measurement Based on a Planar Spiral Coils Stack


This paper presents a sensor composed of a differential arrangement of coils capable of measuring nanometric metallic film thickness. Experimental results achieved aluminum thickness measurements as low as 20 nm with a sensitivity of three.8 mV/nm. This makes this sensor a flexible, nondestructive, and low-cost alternative for metallic thickness measurement all the way down to nanometric scale.

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