Analysis of Mode-Split Operation in MEMS Based on Piezoresistive Nanogauges


Microelectromechanical system (MEMS) sensors based mostly on nanoscale piezoresistive sensing elements (nanogauges) will have mechanical modes either connected solely to micrometric springs or connected conjointly to nanogauge constraints. Due to the different impact that fabrication process imperfections have on these two types of modes, their correlation can be poorer from half to half than in sensors based on capacitive readout. In this context, this paper compares the correlation between two modes in MEMS with and without nanogauges. Experiments show a ± thirtypercent relative variation within the modes difference over 26 samples of the former kind, which is more than 3.five times more than what observed on similar structures with no nanogauges. A theoretical model identifies the sources of this fluctuation (native etching and height nonuniformities), and predicts the behavior and improvements using totally different springs style.

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